An unsatisfying compromise has to be made between acceptable throughput and sufficient data coverage when measuring high-slope machined parts, since metrology tools usually involve some sort of ...

Surface metrology has to increasingly deal with the presence of sub-micron thick films, which are now being used on products well beyond semiconductor devices. Sub-micron films may be incidental – for ...

Non-destructive and accurate characterization of high aspect ratio (HAR) and composite micro-trenches is essential for semiconductor inspection in fields like microelectromechanical systems (MEMS) and ...

(Nanowerk News) Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and ...

The fiber itself is used as a transducer in many fiber optic sensing systems (see the section titled “Fiber Sensors,” in ADVANCES IN OPTICAL METROLOGY, the section titled “Optical Fiber Sensors,” in ...